Starting at $1,780.00
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  • Mass or volumetric flow, pressure, or temperature
  • Ranges from 0 to 10 sccm to 0 to 3000 slpm full scale
  • ±2% of full scale accuracy & 50:1 turndown
  • Maximum internal pressure (static) of 320 psig
  • −10 to 60˚C operating temperature
  • RS-232, RS-485, Modbus, or PROFIBUS digital output
  • 0-5VDC, 1-5VDC, 0-10VDC, or 4-20mA analog output
  • Tunable P & D to fine tune instrument's response speed
  • 30 factory installed, user selectable gas calibrations
  • NIST traceable


The Alicat Scientific MCQ series mass flow controllers were designed to take the guess work out of precision gas flow control. Designed for simplicity, the Alicat Scientific mass flow controllers are very easy to use. The local display permits changes to the configuration of the unit without the need for computers, complicated software or scripts.

The Alicat Scientific MCQ series mass flow controller was designed for applications involving inlet pressures of up to 320 psia. Basic accuracy is ±2.0% of full scale. Calibrated and ready for use with 20 gases and 10 gas blends, The MCQ series has a remarkably fast start-up time and a response time of just 10 milliseconds.

The Alicat Scientific MCQ series mass flow controllers require very little power to run thereby reducing operating costs. The MCQ series flow controllers also have less pressure drop when compared to similar flow devices. Reduced pressure drop means more process fluids go into your process and not into the measurement devices. The MCQ series mass flow controller also measure pressure, temperature, and volumetric flow in addition to mass flow which means fewer instruments to buy and install.

Alicat Scientific MCQ series mass flow controllers have a response time of less than 10 milliseconds and a control time of 100 milliseconds, making it one of the fastest naturally responding mass flow controllers on the market today. They are equipped with multiple analog outputs and inputs. Adding a totalizer allows users to see how much media has flowed through the controller, making it a great way to monitor usage and identify waste. The Alicat Scientific MCQ series mass flow controllers can also be used in applications where flow control into a vacuum is critical. The modular design allows it to be used in vacuum driven systems.

Alicat Scientific MCQ Series Mass Flow Controller Applications

  • Fuel cell testing
  • Vacuum coating
  • Sputtering
  • Process automation
  • Semiconductor processing
  • Micro electro mechanical (MEMs)
  • Solar cell manufacturing
  • Flame tip control




Please consider these optional accessories.