Starting at $1,300.00
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  • Measures mass flow, volumetric flow, pressure (PSIA) and temperature (° Celsius)
  • Customizable units of measure
  • Ranges from 0-10 sccm to 0-3000 slpm full scale
  • Accurate to ±2% of full scale
  • 50:1 Turndown
  • Maximum internal pressure (static): 320 psig
  • Operating temperature: −10 to 60˚C
  • Digital output options: RS-232 serial, RS-485 serial, Modbus, PROFIBUS
  • Analog output options: 0-5 Vdc, 1-5 Vdc, 0-10 Vdc, 4-20 mA
  • 30 factory installed, user selectable gas calibrations
  • NIST traceable


The Alicat Scientific MQ Series mass flow meters are an accurate, versatile, dependable and cost effective solution to measuring gas flow. Unlike traditional mass flow meters, Alicat Scientific mass flow meters utilize laminar flow and differential pressure technology which results in an extremely fast, accurate meter with no warm-up time and unparalleled versatility.

The Alicat Scientific MQ series mass flow controller was designed for applications involving inlet pressures of up to 320 psia. Flow ranges are available from 0.5 standard cubic centimeters per minute to 4000 standard liters per minute with a 50:1 turndown ratio. Basic accuracy is ±2.0% of full scale. Calibrated and ready for use with 20 gases and 10 gas blends, The MQ series has a remarkably fast start-up time and a response time of just 10 milliseconds.

The Alicat Scientifics MQ Series mass flow meter is an extremely versatile instrument. In addition to mass flow measurements, the MQ Series also measures pressure, temperature and volumetric flow which means fewer instruments to buy and install. The MQ series meter can also be equipped with an Alicat 9V battery pack to make a stand alone secondary calibration standard or flow verification meter. Alicat's patented technology allows its mass flow meters to have very few moving parts. All of the internal components are fixed in place resulting in very little physical change inside the mass flow meter. Little physical change in the flow cavity means higher rates of consistency and repeatability.

Alicat Scientific MQ Series mass flow meters were designed to be used as a stand-alone device. All measured parameters are displayed in real time on the digital display. Any measured parameter can be brought to the center of the screen. The push button interface allows easy configuration of the meter without the need for computers, complicated software or scripts. The MQ Series features Gas Select which allows users to select from 30 gases and gas blends via the display or through the RS-232 interface. Remote displays are also available. MQ Series mass flow meters are equipped with multiple analog outputs in addition to the RS-232 digital output.




Please consider these optional accessories.