Starting at $2,500.00
  • Call for availability



  • 316L construction with 316L encapsulated sensors in flow path for aggressive gases
  • Measure mass flow, volumetric flow, pressure (PSIA), temperature
  • Digital display
  • Pressure and temperature measurements taken and displayed in the same unit
  • Mass flow controllers can be set by user to control pressure
  • Multiple digital & analog inputs and outputs
  • Digital and analog input and output available on the same device
  • 200:1 turndown ratio allows the flow measurement at 1/100th of its full scale rating
  • 30 gas select on all units to reduce inventory costs
  • Control range from 1% to 100% of full scale flow
  • Tunable P & D to fine tune instrument's response speed
  • Optional remote display and remote electronics available
  • NIST traceable


The Alicat Scientific MCS/MCRS series 316L aggressive gas compatible mass flow controllers retain the same functionality, as well as fit and finish of the standard line of Alicat Scientific mass flow meters and controllers. The MCS/MCRS flow controllers are built from 316L stainless and use encapsulated 316L sensors in the flow path. A variety of sealing materials are available including FFKM, EPDM, Viton, and Buna-n depending on your application and needs.

The Alicat Scientific MCS/MCRS series mass flow controllers were designed to take the guess work out of precision gas flow control. Designed for simplicity, the Alicat Scientific mass flow controllers are very easy to use. With the local display, changes to the configuration of the unit can be made without the need for computers, complicated software or scripts.

The Alicat Scientific's MCS/MCRS series mass flow controllers have a standard accuracy calibration of ±(0.8% of reading + 0.2% of full scale). A high-accuracy calibration of up to ±(0.4% of reading + 0.2% of full scale) is also available. The MCS/MCRS series mass flow controllers have very few moving parts. All of the internal components are fixed in place, resulting in very little physical change inside the controller resulting in higher rates of consistency and a repeatability of ±-0.2% of FS.

The Alicat Scientifics MCS/MCRS series mass flow controllers require very little power to run thereby reducing operating costs. The MC series flow controllers also have less pressure drop when compared to similar flow devices. Reduced pressure drop means more process fluids go into your process and not into the measurement devices. The MCS/MCRS series mass flow controllers also measure pressure, temperature, and volumetric flow in addition to mass flow which means fewer instruments to buy and install.

Alicat Scientific MCS/MCRS series mass flow controllers have a response time of less than 10 milliseconds and a control time of 100 milliseconds, making it one of the fastest naturally responding mass flow controllers on the market today. They are equipped with multiple analog outputs and inputs. Adding a totalizer allows users to see how much media has flowed through the controller, making it a great way to monitor usage and identify waste. The Alicat Scientific M Series mass flow controllers can also be used in applications where flow control into a vacuum is critical. The modular design allows it to be used in systems in which flow is driven by a vacuum.




Please consider these optional accessories.