MEMS Inertial Sensing Inclinometers & Accelerometers--

The physical mechanisms underlying MEMS accelerometers include capacitive, piezoresistive, electromagnetic, piezoelectric, ferroelectric, optical, and tunneling. The output can be analog, digital, ratiometric to the supply voltage, or any of various types of pulse modulation. Sensors with digital output are convenient when the data must be transmitted without further noise degradation.