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Brooks SLA5800 Series Thermal Mass Flow Meters
Elastomer sealed, digital thermal mass flow meter for general purpose, flow ranges starting at 0.003 to 50 lpm up to 100 to 2500 lpm
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Brooks GF135 Thermal Mass Flow Controller
Pressure transient insensitive mass flow controller with real-time flow error detection and advanced diagnostics
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Brooks GF100 / GF120 / GF125 Mass Flow Controllers
High purity and ultra-high purity digital thermal mass flow devices, flow range from 3 sccm to 55 slm, MultiFlo capabilities
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Brooks GF40 Mass Flow Controller
Elastomer sealed thermal mass flow controllers and meter, multiflo technology, 3 sccm to 50 slpm flow range
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Brooks GF101 / GF121 / GF126 Mass Flow Controllers
High purity & ultra-high purity high flow digital flow devices, flow rates up to 300 slpm, corrosion resistant hastelloy C-22 sensor tube
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Brooks SLAMf Series Thermal Mass Flow Meters
Highly configurable platform, 0.003 up to 2500 lpm flow ranges, NEMA4X / IP66 rated enclosure
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Brooks GF80 / GF81 Mass Flow Controllers
Digital mass flow controllers and meters, metal seals, multiflo capabilities, flow ranges from 3 sccm up to 300 slm
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