Part NumberAlternate P/NDiameter & Connection MethodPower SupplyGasOutput Power CableInstruction ManualPrice
FWD025D2-A00FWD025D2A0025mm / Rc1DC24VAirNoneNone$1,680.00
FWD025D2-A02FWD025D2A0225mm / Rc1DC24VAirNoneEnglish$1,694.00
FWD025D2-A50FWD025D2A5025mm / Rc1DC24VAir5mNone$1,820.00
FWD025D2-A52FWD025D2A5225mm / Rc1DC24VAir5mEnglish$1,834.00
FWD025D2-A20FWD025D2A2025mm / Rc1DC24VAir20mNone$1,960.00
FWD025D2-A22FWD025D2A2225mm / Rc1DC24VAir20mEnglish$1,974.00
FWD025D2-N00FWD025D2N0025mm / Rc1DC24VNitrogenNoneNone$1,680.00
FWD025D2-N02FWD025D2N0225mm / Rc1DC24VNitrogenNoneEnglish$1,694.00
FWD025D2-N50FWD025D2N5025mm / Rc1DC24VNitrogen5mNone$1,820.00
FWD025D2-N52FWD025D2N5225mm / Rc1DC24VNitrogen5mEnglish$1,834.00
FWD025D2-N20FWD025D2N2025mm / Rc1DC24VNitrogen20mNone$1,960.00
FWD025D2-N22FWD025D2N2225mm / Rc1DC24VNitrogen20mEnglish$1,974.00
FWD025B2-A00FWD025B2A0025mm / Rc1Lithium battery built-inAirNoneNone$1,680.00
FWD025B2-A02FWD025B2A0225mm / Rc1Lithium battery built-inAirNoneEnglish$1,694.00
FWD025B2-A50FWD025B2A5025mm / Rc1Lithium battery built-inAir5mNone$1,820.00
FWD025B2-A52FWD025B2A5225mm / Rc1Lithium battery built-inAir5mEnglish$1,834.00
FWD025B2-A20FWD025B2A2025mm / Rc1Lithium battery built-inAir20mNone$1,960.00
FWD025B2-A22FWD025B2A2225mm / Rc1Lithium battery built-inAir20mEnglish$1,974.00
FWD025B2-N00FWD025B2N0025mm / Rc1Lithium battery built-inNitrogenNoneNone$1,680.00
FWD025B2-N02FWD025B2N0225mm / Rc1Lithium battery built-inNitrogenNoneEnglish$1,694.00
FWD025B2-N50FWD025B2N5025mm / Rc1Lithium battery built-inNitrogen5mNone$1,820.00
FWD025B2-N52FWD025B2N5225mm / Rc1Lithium battery built-inNitrogen5mEnglish$1,834.00
FWD025B2-N20FWD025B2N2025mm / Rc1Lithium battery built-inNitrogen20mNone$1,960.00
FWD025B2-N22FWD025B2N2225mm / Rc1Lithium battery built-inNitrogen20mEnglish$1,974.00
FWD032D2-A00FWD032D2A0032mm / Rc1 1/4DC24VAirNoneNone$1,680.00
FWD032D2-A02FWD032D2A0232mm / Rc1 1/4DC24VAirNoneEnglish$1,694.00
FWD032D2-A50FWD032D2A5032mm / Rc1 1/4DC24VAir5mNone$1,820.00
FWD032D2-A52FWD032D2A5232mm / Rc1 1/4DC24VAir5mEnglish$1,834.00
FWD032D2-A20FWD032D2A2032mm / Rc1 1/4DC24VAir20mNone$1,960.00
FWD032D2-A22FWD032D2A2232mm / Rc1 1/4DC24VAir20mEnglish$1,974.00
FWD032D2-N00FWD032D2N0032mm / Rc1 1/4DC24VNitrogenNoneNone$1,680.00
FWD032D2-N02FWD032D2N0232mm / Rc1 1/4DC24VNitrogenNoneEnglish$1,694.00
FWD032D2-N50FWD032D2N5032mm / Rc1 1/4DC24VNitrogen5mNone$1,820.00
FWD032D2-N52FWD032D2N5232mm / Rc1 1/4DC24VNitrogen5mEnglish$1,834.00
FWD032D2-N20FWD032D2N2032mm / Rc1 1/4DC24VNitrogen20mNone$1,960.00
FWD032D2-N22FWD032D2N2232mm / Rc1 1/4DC24VNitrogen20mEnglish$1,974.00
FWD032B2-A00FWD032B2A0032mm / Rc1 1/4Lithium battery built-inAirNoneNone$1,680.00
FWD032B2-A02FWD032B2A0232mm / Rc1 1/4Lithium battery built-inAirNoneEnglish$1,694.00
FWD032B2-A50FWD032B2A5032mm / Rc1 1/4Lithium battery built-inAir5mNone$1,820.00
FWD032B2-A52FWD032B2A5232mm / Rc1 1/4Lithium battery built-inAir5mEnglish$1,834.00
FWD032B2-A20FWD032B2A2032mm / Rc1 1/4Lithium battery built-inAir20mNone$1,960.00
FWD032B2-A22FWD032B2A2232mm / Rc1 1/4Lithium battery built-inAir20mEnglish$1,974.00
FWD032B2-N00FWD032B2N0032mm / Rc1 1/4Lithium battery built-inNitrogenNoneNone$1,680.00
FWD032B2-N02FWD032B2N0232mm / Rc1 1/4Lithium battery built-inNitrogenNoneEnglish$1,694.00
FWD032B2-N50FWD032B2N5032mm / Rc1 1/4Lithium battery built-inNitrogen5mNone$1,820.00
FWD032B2-N52FWD032B2N5232mm / Rc1 1/4Lithium battery built-inNitrogen5mEnglish$1,834.00
FWD032B2-N20FWD032B2N2032mm / Rc1 1/4Lithium battery built-inNitrogen20mNone$1,960.00
FWD032B2-N22FWD032B2N2232mm / Rc1 1/4Lithium battery built-inNitrogen20mEnglish$1,974.00
FWD040D2-A00FWD040D2A0040mm / waferDC24VAirNoneNone$1,680.00
FWD040D2-A02FWD040D2A0240mm / waferDC24VAirNoneEnglish$1,694.00
FWD040D2-A50FWD040D2A5040mm / waferDC24VAir5mNone$1,820.00
FWD040D2-A52FWD040D2A5240mm / waferDC24VAir5mEnglish$1,834.00
FWD040D2-A20FWD040D2A2040mm / waferDC24VAir20mNone$1,960.00
FWD040D2-A22FWD040D2A2240mm / waferDC24VAir20mEnglish$1,974.00
FWD040D2-N00FWD040D2N0040mm / waferDC24VNitrogenNoneNone$1,680.00
FWD040D2-N02FWD040D2N0240mm / waferDC24VNitrogenNoneEnglish$1,694.00
FWD040D2-N50FWD040D2N5040mm / waferDC24VNitrogen5mNone$1,820.00
FWD040D2-N52FWD040D2N5240mm / waferDC24VNitrogen5mEnglish$1,834.00
FWD040D2-N20FWD040D2N2040mm / waferDC24VNitrogen20mNone$1,960.00
FWD040D2-N22FWD040D2N2240mm / waferDC24VNitrogen20mEnglish$1,974.00
FWD040B2-A00FWD040B2A0040mm / waferLithium battery built-inAirNoneNone$1,680.00
FWD040B2-A02FWD040B2A0240mm / waferLithium battery built-inAirNoneEnglish$1,694.00
FWD040B2-A50FWD040B2A5040mm / waferLithium battery built-inAir5mNone$1,820.00
FWD040B2-A52FWD040B2A5240mm / waferLithium battery built-inAir5mEnglish$1,834.00
FWD040B2-A20FWD040B2A2040mm / waferLithium battery built-inAir20mNone$1,960.00
FWD040B2-A22FWD040B2A2240mm / waferLithium battery built-inAir20mEnglish$1,974.00
FWD040B2-N00FWD040B2N0040mm / waferLithium battery built-inNitrogenNoneNone$1,680.00
FWD040B2-N02FWD040B2N0240mm / waferLithium battery built-inNitrogenNoneEnglish$1,694.00
FWD040B2-N50FWD040B2N5040mm / waferLithium battery built-inNitrogen5mNone$1,820.00
FWD040B2-N52FWD040B2N5240mm / waferLithium battery built-inNitrogen5mEnglish$1,834.00
FWD040B2-N20FWD040B2N2040mm / waferLithium battery built-inNitrogen20mNone$1,960.00
FWD040B2-N22FWD040B2N2240mm / waferLithium battery built-inNitrogen20mEnglish$1,974.00
FWD050D2-A00FWD050D2A0050mm / waferDC24VAirNoneNone$1,890.00
FWD050D2-A02FWD050D2A0250mm / waferDC24VAirNoneEnglish$1,904.00
FWD050D2-A50FWD050D2A5050mm / waferDC24VAir5mNone$2,030.00
FWD050D2-A52FWD050D2A5250mm / waferDC24VAir5mEnglish$2,044.00
FWD050D2-A20FWD050D2A2050mm / waferDC24VAir20mNone$2,170.00
FWD050D2-A22FWD050D2A2250mm / waferDC24VAir20mEnglish$2,184.00
FWD050D2-N00FWD050D2N0050mm / waferDC24VNitrogenNoneNone$1,890.00
FWD050D2-N02FWD050D2N0250mm / waferDC24VNitrogenNoneEnglish$1,904.00
FWD050D2-N50FWD050D2N5050mm / waferDC24VNitrogen5mNone$2,030.00
FWD050D2-N52FWD050D2N5250mm / waferDC24VNitrogen5mEnglish$2,044.00
FWD050D2-N20FWD050D2N2050mm / waferDC24VNitrogen20mNone$2,170.00
FWD050D2-N22FWD050D2N2250mm / waferDC24VNitrogen20mEnglish$2,184.00
FWD050B2-A00FWD050B2A0050mm / waferLithium battery built-inAirNoneNone$1,890.00
FWD050B2-A02FWD050B2A0250mm / waferLithium battery built-inAirNoneEnglish$1,904.00
FWD050B2-A50FWD050B2A5050mm / waferLithium battery built-inAir5mNone$2,030.00
FWD050B2-A52FWD050B2A5250mm / waferLithium battery built-inAir5mEnglish$2,044.00
FWD050B2-A20FWD050B2A2050mm / waferLithium battery built-inAir20mNone$2,170.00
FWD050B2-A22FWD050B2A2250mm / waferLithium battery built-inAir20mEnglish$2,184.00
FWD050B2-N00FWD050B2N0050mm / waferLithium battery built-inNitrogenNoneNone$1,890.00
FWD050B2-N02FWD050B2N0250mm / waferLithium battery built-inNitrogenNoneEnglish$1,904.00
FWD050B2-N50FWD050B2N5050mm / waferLithium battery built-inNitrogen5mNone$2,030.00
FWD050B2-N52FWD050B2N5250mm / waferLithium battery built-inNitrogen5mEnglish$2,044.00
FWD050B2-N20FWD050B2N2050mm / waferLithium battery built-inNitrogen20mNone$2,170.00
FWD050B2-N22FWD050B2N2250mm / waferLithium battery built-inNitrogen20mEnglish$2,184.00
FWD065D2-A00FWD065D2A0065mm / waferDC24VAirNoneNone$2,030.00
FWD065D2-A02FWD065D2A0265mm / waferDC24VAirNoneEnglish$2,044.00
FWD065D2-A50FWD065D2A5065mm / waferDC24VAir5mNone$2,170.00
FWD065D2-A52FWD065D2A5265mm / waferDC24VAir5mEnglish$2,184.00
FWD065D2-A20FWD065D2A2065mm / waferDC24VAir20mNone$2,310.00
FWD065D2-A22FWD065D2A2265mm / waferDC24VAir20mEnglish$2,324.00
FWD065D2-N00FWD065D2N0065mm / waferDC24VNitrogenNoneNone$2,030.00
FWD065D2-N02FWD065D2N0265mm / waferDC24VNitrogenNoneEnglish$2,044.00
FWD065D2-N50FWD065D2N5065mm / waferDC24VNitrogen5mNone$2,170.00
FWD065D2-N52FWD065D2N5265mm / waferDC24VNitrogen5mEnglish$2,184.00
FWD065D2-N20FWD065D2N2065mm / waferDC24VNitrogen20mNone$2,310.00
FWD065D2-N22FWD065D2N2265mm / waferDC24VNitrogen20mEnglish$2,324.00
FWD065B2-A00FWD065B2A0065mm / waferLithium battery built-inAirNoneNone$2,030.00
FWD065B2-A02FWD065B2A0265mm / waferLithium battery built-inAirNoneEnglish$2,044.00
FWD065B2-A50FWD065B2A5065mm / waferLithium battery built-inAir5mNone$2,170.00
FWD065B2-A52FWD065B2A5265mm / waferLithium battery built-inAir5mEnglish$2,184.00
FWD065B2-A20FWD065B2A2065mm / waferLithium battery built-inAir20mNone$2,310.00
FWD065B2-A22FWD065B2A2265mm / waferLithium battery built-inAir20mEnglish$2,324.00
FWD065B2-N00FWD065B2N0065mm / waferLithium battery built-inNitrogenNoneNone$2,030.00
FWD065B2-N02FWD065B2N0265mm / waferLithium battery built-inNitrogenNoneEnglish$2,044.00
FWD065B2-N50FWD065B2N5065mm / waferLithium battery built-inNitrogen5mNone$2,170.00
FWD065B2-N52FWD065B2N5265mm / waferLithium battery built-inNitrogen5mEnglish$2,184.00
FWD065B2-N20FWD065B2N2065mm / waferLithium battery built-inNitrogen20mNone$2,310.00
FWD065B2-N22FWD065B2N2265mm / waferLithium battery built-inNitrogen20mEnglish$2,324.00
FWD080D2-A00FWD080D2A0080mm / waferDC24VAirNoneNone$2,100.00
FWD080D2-A02FWD080D2A0280mm / waferDC24VAirNoneEnglish$2,114.00
FWD080D2-A50FWD080D2A5080mm / waferDC24VAir5mNone$2,240.00
FWD080D2-A52FWD080D2A5280mm / waferDC24VAir5mEnglish$2,254.00
FWD080D2-A20FWD080D2A2080mm / waferDC24VAir20mNone$2,380.00
FWD080D2-A22FWD080D2A2280mm / waferDC24VAir20mEnglish$2,394.00
FWD080D2-N00FWD080D2N0080mm / waferDC24VNitrogenNoneNone$2,100.00
FWD080D2-N02FWD080D2N0280mm / waferDC24VNitrogenNoneEnglish$2,114.00
FWD080D2-N50FWD080D2N5080mm / waferDC24VNitrogen5mNone$2,240.00
FWD080D2-N52FWD080D2N5280mm / waferDC24VNitrogen5mEnglish$2,254.00
FWD080D2-N20FWD080D2N2080mm / waferDC24VNitrogen20mNone$2,380.00
FWD080D2-N22FWD080D2N2280mm / waferDC24VNitrogen20mEnglish$2,394.00
FWD080B2-A00FWD080B2A0080mm / waferLithium battery built-inAirNoneNone$2,100.00
FWD080B2-A02FWD080B2A0280mm / waferLithium battery built-inAirNoneEnglish$2,114.00
FWD080B2-A50FWD080B2A5080mm / waferLithium battery built-inAir5mNone$2,240.00
FWD080B2-A52FWD080B2A5280mm / waferLithium battery built-inAir5mEnglish$2,254.00
FWD080B2-A20FWD080B2A2080mm / waferLithium battery built-inAir20mNone$2,380.00
FWD080B2-A22FWD080B2A2280mm / waferLithium battery built-inAir20mEnglish$2,394.00
FWD080B2-N00FWD080B2N0080mm / waferLithium battery built-inNitrogenNoneNone$2,100.00
FWD080B2-N02FWD080B2N0280mm / waferLithium battery built-inNitrogenNoneEnglish$2,114.00
FWD080B2-N50FWD080B2N5080mm / waferLithium battery built-inNitrogen5mNone$2,240.00
FWD080B2-N52FWD080B2N5280mm / waferLithium battery built-inNitrogen5mEnglish$2,254.00
FWD080B2-N20FWD080B2N2080mm / waferLithium battery built-inNitrogen20mNone$2,380.00
FWD080B2-N22FWD080B2N2280mm / waferLithium battery built-inNitrogen20mEnglish$2,394.00
FWD100D2-A00FWD100D2A00100mm / JIS10K flangeDC24VAirNoneNone$5,880.00
FWD100D2-A02FWD100D2A02100mm / JIS10K flangeDC24VAirNoneEnglish$5,894.00
FWD100D2-A50FWD100D2A50100mm / JIS10K flangeDC24VAir5mNone$6,020.00
FWD100D2-A52FWD100D2A52100mm / JIS10K flangeDC24VAir5mEnglish$6,034.00
FWD100D2-A20FWD100D2A20100mm / JIS10K flangeDC24VAir20mNone$6,160.00
FWD100D2-A22FWD100D2A22100mm / JIS10K flangeDC24VAir20mEnglish$6,174.00
FWD100D2-N00FWD100D2N00100mm / JIS10K flangeDC24VNitrogenNoneNone$5,880.00
FWD100D2-N02FWD100D2N02100mm / JIS10K flangeDC24VNitrogenNoneEnglish$5,894.00
FWD100D2-N50FWD100D2N50100mm / JIS10K flangeDC24VNitrogen5mNone$6,020.00
FWD100D2-N52FWD100D2N52100mm / JIS10K flangeDC24VNitrogen5mEnglish$6,034.00
FWD100D2-N20FWD100D2N20100mm / JIS10K flangeDC24VNitrogen20mNone$6,160.00
FWD100D2-N22FWD100D2N22100mm / JIS10K flangeDC24VNitrogen20mEnglish$6,174.00
FWD100B2-A00FWD100B2A00100mm / JIS10K flangeLithium battery built-inAirNoneNone$5,880.00
FWD100B2-A02FWD100B2A02100mm / JIS10K flangeLithium battery built-inAirNoneEnglish$5,894.00
FWD100B2-A50FWD100B2A50100mm / JIS10K flangeLithium battery built-inAir5mNone$6,020.00
FWD100B2-A52FWD100B2A52100mm / JIS10K flangeLithium battery built-inAir5mEnglish$6,034.00
FWD100B2-A20FWD100B2A20100mm / JIS10K flangeLithium battery built-inAir20mNone$6,160.00
FWD100B2-A22FWD100B2A22100mm / JIS10K flangeLithium battery built-inAir20mEnglish$6,174.00
FWD100B2-N00FWD100B2N00100mm / JIS10K flangeLithium battery built-inNitrogenNoneNone$5,880.00
FWD100B2-N02FWD100B2N02100mm / JIS10K flangeLithium battery built-inNitrogenNoneEnglish$5,894.00
FWD100B2-N50FWD100B2N50100mm / JIS10K flangeLithium battery built-inNitrogen5mNone$6,020.00
FWD100B2-N52FWD100B2N52100mm / JIS10K flangeLithium battery built-inNitrogen5mEnglish$6,034.00
FWD100B2-N20FWD100B2N20100mm / JIS10K flangeLithium battery built-inNitrogen20mNone$6,160.00
FWD100B2-N22FWD100B2N22100mm / JIS10K flangeLithium battery built-inNitrogen20mEnglish$6,174.00
FWD150D2-A00FWD150D2A00150mm / wafer flangeDC24VAirNoneNone$7,280.00
FWD150D2-A02FWD150D2A02150mm / wafer flangeDC24VAirNoneEnglish$7,294.00
FWD150D2-A50FWD150D2A50150mm / wafer flangeDC24VAir5mNone$7,420.00
FWD150D2-A52FWD150D2A52150mm / wafer flangeDC24VAir5mEnglish$7,434.00
FWD150D2-A20FWD150D2A20150mm / wafer flangeDC24VAir20mNone$7,560.00
FWD150D2-A22FWD150D2A22150mm / wafer flangeDC24VAir20mEnglish$7,574.00
FWD150D2-N00FWD150D2N00150mm / wafer flangeDC24VNitrogenNoneNone$7,280.00
FWD150D2-N02FWD150D2N02150mm / wafer flangeDC24VNitrogenNoneEnglish$7,294.00
FWD150D2-N50FWD150D2N50150mm / wafer flangeDC24VNitrogen5mNone$7,420.00
FWD150D2-N52FWD150D2N52150mm / wafer flangeDC24VNitrogen5mEnglish$7,434.00
FWD150D2-N20FWD150D2N20150mm / wafer flangeDC24VNitrogen20mNone$7,560.00
FWD150D2-N22FWD150D2N22150mm / wafer flangeDC24VNitrogen20mEnglish$7,574.00
FWD150B2-A00FWD150B2A00150mm / wafer flangeLithium battery built-inAirNoneNone$7,280.00
FWD150B2-A02FWD150B2A02150mm / wafer flangeLithium battery built-inAirNoneEnglish$7,294.00
FWD150B2-A50FWD150B2A50150mm / wafer flangeLithium battery built-inAir5mNone$7,420.00
FWD150B2-A52FWD150B2A52150mm / wafer flangeLithium battery built-inAir5mEnglish$7,434.00
FWD150B2-A20FWD150B2A20150mm / wafer flangeLithium battery built-inAir20mNone$7,560.00
FWD150B2-A22FWD150B2A22150mm / wafer flangeLithium battery built-inAir20mEnglish$7,574.00
FWD150B2-N00FWD150B2N00150mm / wafer flangeLithium battery built-inNitrogenNoneNone$7,280.00
FWD150B2-N02FWD150B2N02150mm / wafer flangeLithium battery built-inNitrogenNoneEnglish$7,294.00
FWD150B2-N50FWD150B2N50150mm / wafer flangeLithium battery built-inNitrogen5mNone$7,420.00
FWD150B2-N52FWD150B2N52150mm / wafer flangeLithium battery built-inNitrogen5mEnglish$7,434.00
FWD150B2-N20FWD150B2N20150mm / wafer flangeLithium battery built-inNitrogen20mNone$7,560.00
FWD150B2-N22FWD150B2N22150mm / wafer flangeLithium battery built-inNitrogen20mEnglish$7,574.00
FWD200D2-A00FWD200D2A00200mm / wafer flangeDC24VAirNoneNone$8,680.00
FWD200D2-A02FWD200D2A02200mm / wafer flangeDC24VAirNoneEnglish$8,694.00
FWD200D2-A50FWD200D2A50200mm / wafer flangeDC24VAir5mNone$8,820.00
FWD200D2-A52FWD200D2A52200mm / wafer flangeDC24VAir5mEnglish$8,834.00
FWD200D2-A20FWD200D2A20200mm / wafer flangeDC24VAir20mNone$8,960.00
FWD200D2-A22FWD200D2A22200mm / wafer flangeDC24VAir20mEnglish$8,974.00
FWD200D2-N00FWD200D2N00200mm / wafer flangeDC24VNitrogenNoneNone$8,680.00
FWD200D2-N02FWD200D2N02200mm / wafer flangeDC24VNitrogenNoneEnglish$8,694.00
FWD200D2-N50FWD200D2N50200mm / wafer flangeDC24VNitrogen5mNone$8,820.00
FWD200D2-N52FWD200D2N52200mm / wafer flangeDC24VNitrogen5mEnglish$8,834.00
FWD200D2-N20FWD200D2N20200mm / wafer flangeDC24VNitrogen20mNone$8,960.00
FWD200D2-N22FWD200D2N22200mm / wafer flangeDC24VNitrogen20mEnglish$8,974.00
FWD200B2-A00FWD200B2A00200mm / wafer flangeLithium battery built-inAirNoneNone$8,680.00
FWD200B2-A02FWD200B2A02200mm / wafer flangeLithium battery built-inAirNoneEnglish$8,694.00
FWD200B2-A50FWD200B2A50200mm / wafer flangeLithium battery built-inAir5mNone$8,820.00
FWD200B2-A52FWD200B2A52200mm / wafer flangeLithium battery built-inAir5mEnglish$8,834.00
FWD200B2-A20FWD200B2A20200mm / wafer flangeLithium battery built-inAir20mNone$8,960.00
FWD200B2-A22FWD200B2A22200mm / wafer flangeLithium battery built-inAir20mEnglish$8,974.00
FWD200B2-N00FWD200B2N00200mm / wafer flangeLithium battery built-inNitrogenNoneNone$8,680.00
FWD200B2-N02FWD200B2N02200mm / wafer flangeLithium battery built-inNitrogenNoneEnglish$8,694.00
FWD200B2-N50FWD200B2N50200mm / wafer flangeLithium battery built-inNitrogen5mNone$8,820.00
FWD200B2-N52FWD200B2N52200mm / wafer flangeLithium battery built-inNitrogen5mEnglish$8,834.00
FWD200B2-N20FWD200B2N20200mm / wafer flangeLithium battery built-inNitrogen20mNone$8,960.00
FWD200B2-N22FWD200B2N22200mm / wafer flangeLithium battery built-inNitrogen20mEnglish$8,974.00