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Overview

Features

  • Ultra-trace measurements of Ar, N2, H2, CH4, CO and CO2, and NMHC
  • Innovative high-sensitivity Plasma Emission Detector (PED)
  • ProPeak peak detection technique
  • Complete stand-alone UHP gas analysis solution
  • Digital communications for remote access
  • Internal dilution system option

Description

The Servomex SERVOPRO NanoChrome gas analyzer is specifically designed for the semiconductor manufacturing industry, the NanoChrome offers the highest reliability monitoring of argon (Ar), methane (CH4), carbon monoxide (CO), carbon dioxide (CO2), hydrogen (H2), nitrogen (N2) and non-methane hydrocarbons (NMHC) in a wide range of common background gases including Ar, H2, helium (He), N2 and oxygen (O2).

Updated with a larger display and the latest software, the NanoChrome uses an advanced Plasma Emission Detector (PED) sensor and sensitive ProPeak software, both specially developed by Servomex.

The NanoChrome's sensing technology provides considerable advantages over traditional Flame Ionization Detector (FID) and Reduction Gas Detection (RGD) sensing technologies in terms of performance, stability, safety and ability to reduce on-going costs. Servomex's advanced signal recovery uses patented ProPeak filtering methods to deliver a highly sensitive and selective measurement you can rely on. With no need for a methanizer or requirement flammable fuel gas, the NanoChrome also delivers appreciable cost benefits.