The Brooks GF101 / GF121 / GF126 Mass Flow Controllers are designed for semiconductor, MOCVD, and other gas flow control applications that require a high purity all-metal flow path. The GF101/ GF121 / GF126 support flow rates up to 300 slpm N2 equivalent. The high flow design utilizes the GF sensor design and electronics. This high flow product provides excellent flow stability for purge lines in CVD, LPCVD, Diffusion, Epi processes, semiconductor chamber clean processes, and MOCVD purge flows.
Applications for the GF101 / GF121 / GF126 Flow Controllers include:
This product can be used in the following applications:
We're open Mo-Th 8am to 5:30pm. Fr 8am to 5pm ET