The Brooks GF100 / GF120 / GF125 Mass Flow Controller are designed for semiconductor, MOCVD, and other gas flow control applications that require a high purity all-metal flow path. The Brooks GF100 series mass flow controllers and meters deliver outstanding performance, reliability, and flexibility.
The GF100 series feature set was selected to enable drop-in replacement and upgrade of most brands of metal-seal mass flow controllers, including the former Celerity, UNIT, Tylan, and Mykrolis brands. With the wide range of options and features available, the GF100 Series provides users with a path to simplification and standardization, greatly reducing spares, inventory, and support costs.
The GF125 is a second generation, multi-variable, pressure transient insensitive mass flow controller. This product builds upon Brooks' leadership position in pressure transient insensitive (PTI) mass flow controller technology, minimizing process gas flow variation due to pressure and temperature fluctuations. The GF125 enables customers to simplify and reduce the size and cost of gas panels by eliminating the need for point of use pressure regulators, pressure transducers, and associated hardware.
Applications for the GF100 Series include:
This product can be used in the following applications:
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