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  • GF80 / GF81
  • Call for availability


  • Metal sealed flow controllers and meters
  • Flow ranges:
    • GF80: 3 sccm to 55 slm
    • GF81: 51 to 300 slm
  • ±1% flow accuracy
  • Corrosion-resistant hastelloy C-22 sensor
  • Adaptable mechanical configurations
  • RS485, DeviceNet & Profibus communication options
  • Less than ±0.5% stability
  • Solenoid control valve
  • Slimline body with VCR fittings
An engineer will contact you regarding your application data prior to final processing of any Brooks Instrument order.

The Brooks GF80 / GF81 Mass Flow Controllers feature corrosion-resistant Hastelloy C-22 sensors for durable, long-term operation. With under 1 second settling times and 1% of set point accuracy ensure that the GF80 / GF81 will provide reliable flow measurement or flow control in demanding gas flow applications. Both GF80 and GF81 achieve excellent internal to external leak integrity for challenging process gases as found in CVD, solar, and other processes. With a wide range of digital and analog I/O options available, the GF80 / GF81 represents an extremely powerful, yet easy, upgrade for existing MFCs or MFMs.

Applications for the GF80 / GF81 Flow Controllers include:

  • Cost efficient retrofit/upgrade of legacy MFCs in refurbished semiconductor process tools
  • Reduce MFC inventory in six-inch/eight-inch semiconductor fabs
  • MOCVD for LED and power device manufacturing
  • Solar/thin film chemical vapor deposition (CVD) systems
  • Analytical OEM equipment