Brooks SLA5800 Series Thermal Mass Flow Meters
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SLA5800 Series

Brooks Instrument

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  • Flow ranges available:
    • SLA5850/SLA5860: 0.003 to 50 lpm
    • SLA5851/SLA5861: 15 to 100 lpm
    • SLA5853/SLA5863: 100 to 2500 lpm
  • Turn down ratios:
    • 100:1 for 1 to 50 lpm flow ranges
    • 50:1 for all other ranges
  • Advanced thermal flow measurement sensor
  • Advanced diagnostics
  • Multi-gas/multi-range capabilities
  • Multiple communications
  • 32 to 149°F (0 to 65°C) operating range
  • CE, UL, ATEX and IECEx certifications available

The Brooks SLA5800 series thermal mass flow meters provide a highly configurable platform based on a simple modular architecture. The SLA5800 series feature set was carefully selected to enable drop-in replacement and upgrade of many brands of mass flow controllers. With the wide range of options and features available, the SLA5800 series provides users with a single platform to support a broad range of applications.

The SLA5800 series covers an extremely broad range of flow rates. For ranges from 1 to 50 lpm the turn down ratio is 100:1. For all other ranges the turn down ratio is 50:1. The all-digital electronics and mechanical configuration in the SLA5800 series provide for ultra fast response characteristics. The SLA5800 series multi-gas and multi-range capabilities reduce inventory. Storage and pre-programming of up to 6 gas calibrations easily permits users to switch between different gases and ranges on a single device.


This product can be used in the following applications: