The Brooks SLA5800 series thermal mass flow meters provide a highly configurable platform based on a simple modular architecture. The SLA5800 series feature set was carefully selected to enable drop-in replacement and upgrade of many brands of mass flow controllers. With the wide range of options and features available, the SLA5800 series provides users with a single platform to support a broad range of applications.
The SLA5800 series covers an extremely broad range of flow rates. For ranges from 1 to 50 lpm the turn down ratio is 100:1. For all other ranges the turn down ratio is 50:1. The all-digital electronics and mechanical configuration in the SLA5800 series provide for ultra fast response characteristics. The SLA5800 series multi-gas and multi-range capabilities reduce inventory. Storage and pre-programming of up to 6 gas calibrations easily permits users to switch between different gases and ranges on a single device.
This product can be used in the following applications:
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