Brooks GF135 Thermal Mass Flow Controller
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Brooks Instrument

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  • Real-time flow error detection
  • Sensor stability tracking
  • Valve leak-by tracking
  • 3 sccm to 5 slm flow range
  • Flow accuracy:
    • ±1% S.P. (10-100% F.S.)
    • ±1% S.P. plus ±0.04% F.S. (2-10% F.S.)
  • 100 psia max operating pressure
  • Normally closed valve
  • Corrosion resistant hastelloy sensor
  • 50 to 122°F (10 to 50°C) operating temp

The Brooks GF135 Thermal Mass Flow Controller combines all of the benefits provided by the most advanced pressure transient insensitive mass flow controller (MFC) and adds real-time flow error detection with advanced diagnostics. The GF135 is a revolutionary pressure transient insensitive (PTI) mass flow controller for semiconductor manufacturing. The advanced diagnostic capabilities let users verify accuracy, check valve leak-by, and monitor sensor drift without stopping production of wafers.

The GF135 has a flow range of 3 sccm to 5 slm and an accuracy of ±1% S.P. The corrosion resistant hastelloy sensor provides unmatched long-term sensor stability ensuring maximum yield. The GF135 delivers up to 3 times faster response and settling time compared to other mass flow controllers.


This product can be used in the following applications: