Setra 225 Pressure Transducers
Low-cavity volume eliminates particle entrapment for ultra high-purity applications
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- 0.11 in³ cavity volume
- ±0.25% FS Accuracy RSS
- EMI/RFI immunity
- 316L VIM/VAR stainless steel
- 1 x 10-9 ATMCC/sec leak tested
- UL-1604 approval option
- ATEX 94/9/EC approval option
- CE Conformance
- RoHS Compliant
The Setra 225 pressure transducers are ideally suited for high-purity gas delivery systems semiconductor processes, and control applications that require ultra-clean operation, high throughput perfomance, and exceptional long-term stability.
Designed with a low cavity volume of 0.11 in3, virtually eliminating particle entrapment, the 225 can be easily purged. All wetted parts are 316L VIM/VAR stainless steel passivated to 5 Ra (7 Ra. max.) fi nish, which eliminates surface irregularities and provides the proper surface chemistry for corrosion resistance, assuring contaminant-free gas distribution. Every sensor is mass spectrometer helium leak tested to 1 x 10-9 ATMCC/sec.
The 225 series comes with a rotatable cover for easy access to 12-turn potentiometers for fi ne zero and span adjustment. Standard swivel male or famale face seal pressure fi ttings meet the semicondcutor industry requirements. In addition, several other fittings styles are available.
The 225 is offered with a 5 VDC, 10 VDC or 4-20 mA output. A six-foot multiconductor cable or Bayonet connector is provided for electrical termination.
Setra's patented variable capacitance sensor features a VIM/VAR 316L stainless steel diaphragm and an insulated electrode plate. A variable capacitor is formed between the sensor body and the electrode plate. An increase in pressure causes a slight rounding of the diaphragm, which decreases the capacitance. The capacitance change is detected and converted to a highly accurate linear DC electric signal. Setra's unique custom integrated circuit, utilizes a patented charge balance principle and is virtually EMI/RFI immune.
After manufacture and assembly, Setra's Ultra- High Purity pressure transducers are flushed with deionized water, purged with high-purity heated nitrogen, baked, double bagged, backfi lled with nitrogen and sealed, prior to shipping.
Applications for the Setra 225 pressure transducer:
- Gas Cabinets
- High Purity Gas Delivery Systems
- Semiconductor Process
This product can be used in the following applications: